Dust-containing gas treatment apparatus

ABSTRACT

In order to provide a dust-containing gas treatment apparatus which can smoothly achieve the treatment of gas containing dust of high concentration, the apparatus is equipped with a cylindrical treatment room to introduce gas containing dust and remove the dust from the gas, catcher consisting of brush with the hair planted in the support installed in the treatment room to catch the dust contained in the gas, liquid spraying mechanism installed in the treatment room, rotary driving mechanism to rotate the catcher and stirrer, gas introducing portion to introduce the gas containing dust, gas discharging portion to discharge the gas, the dust removed, from the treatment room and liquid discharging portion to discharge the liquid containing the dust removed from the gas.

TECHNICAL FIELD

This invention concerns a dust-containing gas treatment apparatus toremove dust from gas containing dust.

BACKGROUND ART

As the dust-containing gas treatment to remove dust from gas, variousdry and wet apparatuses have been proposed (for example, see patentliteratures 1-2).

In many cases, such conventional dust-containing gas treatmentapparatuses have the purpose of treating gas containing dust of lowconcentration such exhaust gas discharged from semiconductormanufacturing equipment, and a problem has been that they cannotsmoothly treat when they are applied for treating gas containing dust ofrelatively high concentration.

LITERATURE OF PRIOR ART Patent Literature

[Patent literature 1] Journal of Tokkai No. 2000-140546

[Patent literature 2] Journal Jitsu-Kaihei No. 4-65114

OUTLINE OF INVENTION Problems to be Solved by the Invention

In consideration of the problems of the conventional dust-containing gastreatment apparatuses, this invention has the purpose of providing adust-containing gas treatment apparatus which can smoothly treat gas ofhigh concentration.

Means to Solve the Problems

In order to achieve the above purpose, the dust-containing gas treatmentapparatus of this invention is characterized in that it is equipped witha cylindrical treatment room to introduce the dust-containing gas andremove the dust from the gas, a catcher consisting of brush with hairplanted on the support to catch the dust contained in the gas, installedin the treatment room, liquid spraying mechanism installed in thetreatment room, storage portion of the liquid dropping through thetreatment room, rotary driving mechanism to rotate the catcher, gasintroducing portion to introduce the dust-containing gas into thetreatment room, gas discharging portion to discharge the gas dustremoved, from the treatment room, and liquid discharging portion todischarge the liquid containing the dust removed from the gas.

In this case, it is possible to arrange a switching mechanism to changethe aforementioned gas introducing and discharging portions to upperdirection or lower direction of the treatment room.

It is also possible to arrange the liquid discharging portion at anupper position from the inner bottom face of the aforementioned liquidstorage portion and the gas introducing and gas discharging portions ata higher position than that.

It is also possible to arrange the aforementioned liquid sprayingmechanism at an intermediate position of the treatment room and usehydrophobic material for the hair of the catcher consisting of the brushat a higher position than that and hydrophilic material for the hair ofthe catcher consisting of the brush at a lower position.

It is also possible to install a stirrer for the aforementioned liquidstorage portion and a rotary driving mechanism to rotate the stirrer.

The aforementioned treatment room can be divided into higher and lowerportions.

The aforementioned liquid storage portion and liquid discharging portioncan be shared by multiple dust-containing gas apparatuses.

The liquid recovered in the aforementioned liquid storage portion can becirculated to the liquid spraying mechanism.

Effect of the Invention

According to the dust-containing gas treatment apparatus, it is equippedwith a cylindrical treatment room to introduce dust-containing gas andremove the dust from the gas, a catcher consisting of hair planted onthe support to catch the dust contained in the gas, arranged in thetreatment room, liquid spraying mechanism installed in the treatmentroom, storage portion of the liquid dropping through the treatment room,rotary driving mechanism to rotate the catcher, gas introducing portionto introduce dust-containing gas into the treatment room, gasdischarging portion to discharge the gas dust-removed, and liquiddischarging portion to discharge the liquid containing dust removed fromthe gas, so that the dust caught by the catcher is washed down by theliquid sprayed from the spraying mechanism and recovered in the storageportion of the liquid dropping through the treatment room, and theliquid containing dust is sequentially discharged via the liquiddischarging portion from the liquid storage portion, thereby making itpossible to treat the gas containing dust of high concentration,maintenance-free and smoothly without using a lot of liquid underlow-load environment with less pressure loss.

In addition to the removal of the dust contained in the gas, it issimultaneously possible to make harmless the harmful gas contained inthe gas by means of the liquid sprayed from the spraying mechanism.

By installing a switching mechanism to switch the aforementioned gasintroducing and gas discharging portions to upper or lower direction ofthe treatment room, it is possible to securely treat the gas containingdust to be treated by switching the gas introducing portion and gasdischarging portion in accordance with properties of the gas containingthe dust to be treated.

By arranging the liquid discharging portion at a higher position thanthe inner bottom face of aforementioned liquid storage portion and thegas introducing and gas discharging portions at a higher position thanthat, it is possible to sequentially and safely discharge the liquidcontaining dust from the liquid storage portion.

By arranging the aforementioned liquid spraying mechanism at theintermediate position of the treatment room and using hydrophobicmaterial for the hair of the catcher consisting of the brush at a higherposition than that and hydrophilic material for the hair of the catcherconsisting of the brush at a lower position, it is possible to dischargedry the gas discharged from the gas discharging portion and at the sameto improve the dust removing efficiency of the catcher.

By installing a stirrer for the aforementioned liquid storage portionand installing a rotary driving mechanism to rotate the stirrer, it ispossible to sequentially and securely discharge the liquid containingdust from the liquid storage portion via the liquid discharging portion,thus making it possible to treat more smoothly the gas containing dustof high concentration without using a lot of liquid.

By dividing the aforementioned treatment room into upper and lowerportions, it is possible to conduct multiple treatments with a compactapparatus, such as dust removal and making harmful gas harmless.

By sharing the aforementioned liquid storage portion and liquiddischarging portion with multiple dust-containing gas treatmentapparatuses, it is possible to simplify the apparatus composition.

By circulating the liquid recovered in the aforementioned liquid storageportion to the liquid spraying mechanism, it is possible to reduce theliquid use and discharge quantities.

BRIEF DESCRIPTION OF DRAWINGS

[Drawing 1] Explanatory drawing to show Embodiment 1 of dust-containinggas treatment apparatus of this invention

[Drawing 2] Explanatory drawing to show Embodiment 2 of dust-containinggas treatment apparatus of this invention

[Drawing 3] Explanatory drawing to show Embodiment 3 of dust-containinggas treatment apparatus of this invention

[Drawing 4] Explanatory drawing to show Embodiment 4 of dust-containinggas treatment apparatus of this invention

[Drawing 5] Explanatory drawing to show the dust-removing performance ofvarious types of equipment including the dust-containing gas treatmentapparatus of this invention

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The following explains the preferred embodiments of the dust-containinggas treatment apparatus of this invention in accordance with thedrawings.

Drawing 1 shows Embodiment 1 of the dust-containing gas treatmentapparatus of this invention.

This dust-containing gas treatment apparatus is to remove dust from gascontaining dust, and is equipped with a tubular, preferably acylindrical treatment room 1 to introduce the gas containing dust andremove the dust from the gas, catcher 2 consisting brush with hair 22planted on support 21 to catch the dust contained in the gas, arrangedin the treatment room 1, liquid spraying mechanism 3 installed in thetreatment room 1, liquid storage portion 5 equipped with stirrer 4formed at the lower part of the treatment room 1, rotary drivingmechanism 6 to rotate the catcher 2 and stirrer 4, gas introducingportion 7 to introduce dust-containing gas into the treatment 1, gasdischarging portion 8 to discharge the gas with the dust removed fromthe treatment room 1, and liquid discharging portion 9 to discharge theliquid containing the dust removed from the gas.

The brush with hair 22 planted in support 21 to form the catcher 2includes a brush with hair 22 locally planted in the catcher 21 andbrush with hair 22 planted diversely almost all the support 21.

As the brush with the hair 22 planted locally in a concentrated way, aspiral brush (this embodiment), disk brush, etc. are included.

The brush to form the catcher 2 is preferable that the end of the hair22 planted in the support 21 is set in contact with the inside peripheryof the cylindrical room 1.

This makes it possible that the inside periphery of the treatment room 1is always kept clean by the brush forming the catcher 2.

The materials of the brush support 21 and hair 22 are not particularlylimited, but considering the treatment temperature, if the treatmenttemperature is relatively low, such as ordinary temperature or roomtemperature to about 110° C., it is possible to use various types ofsynthetic resins such as polyethylene phthalate resin and polyamideresin of relatively low heat resistance or conductive synthetic resinmixed with conductive powder such as metal. If the treatment temperatureis higher, synthetic resin of high heat resistance, conductive syntheticresin of high heat resistance mixed with conductive powder such as metalor metal is used. When the treatment temperature is raised, materialsespecially high in heat conductivity, metals such as copper, aluminum,iron and stainless steel or ceramic wool, or fiber formed by mixture ofmetal and ceramic is selected, thereby making it possible for thecatcher to efficiently absorb the heat in the treatment room, and it ameans to heat the catcher is provided, the heating of the heating meanscan be conveyed efficiently to the surface of the catcher, so that thetreating capacity of the apparatus when starting can be sharply raisedand the chemical treatment on the surface of the catcher is activelyadvanced, thus making it possible for the catcher to easily andefficiently catch solids produced through the chemical treatment.

The liquid spraying mechanism 3 installed in the treatment room 1 hasnozzle 31 installed to a higher portion of the treatment room 1,preferably to the ceiling surface so that the liquid can be uniformlysprayed in the treatment room.

The installation position of the nozzle 31 is not limited to such aplace, but it can be provided on the inside periphery surface or thesupport 21 of the brush to form the catcher 2.

For the liquid to be sprayed from the liquid spraying mechanism 3, it ispossible to use water or liquid in accordance with the properties of thegas with dust to be removed, or chemical treatment conducted in thetreatment room 1, specifically oxidizing, reducing, decomposing, orneutralizing.

The liquid storage portion 5 equipped with the stirrer formed at thelower part of the treatment room 1 temporarily recovers and stores theliquid containing the dust caught by the catcher 2 and washed down bythe liquid sprayed from the spraying mechanism 3, and sequentiallydischarges it via the liquid discharging mechanism 9.

The stirrer 4 is not limited in shape, so long as it can stir the liquidcontaining dust stored in the storage portion 5 and discharge ituniformed in concentration, and it is possible to adopt a rod shape,screw shape, or propeller shape.

Since this makes it possible to discharge the dust-containing liquid ofthe concentration uniformed, it is possible to smoothly treat the gascontaining the dust of high concentration without using a lot of liquid.The stirrer 4 can be omitted depending on the properties of the gascontaining the dust to be removed and the content of treatment.

The liquid storage portion 5 can be formed integral at the lower part ofthe treatment room 1 or removable in the treatment room 1 for thepurposes of maintenance and treatment of large quantity of dust.

The rotary driving mechanism 6 to rotate the catcher 2 and stirrer 4rotates them so as to enhance the catching effect of the dust to becaught by the catcher 2 and the effect of uniforming the concentrationof the dust containing dust stored in the liquid storage portion 5 bymeans of the stirrer 4.

In this embodiment, the rotating shaft of the catcher (brush support 21)and that of the stirrer 4 are made same and the rotary driving mechanism6 is made common, but individual driving mechanisms can also be adopted.For the rotating shaft (brush support 21) of the catcher 2 and that ofthe stirrer 4, bearing is provided at both ends so that high-speedrotation of 1000 rpm, for example, is made possible, but it is possibleto provide the bearing only at the upper end.

The number of revolutions of the catcher 2 is 100˜2000 rpm, preferably500˜1800 rpm, more preferably 800˜1500 rpm.

The gas introducing portion 7 and gas discharging portion 8 areconnected so as to be able to change to the upper or lower part of thetreatment room 1 via the switching mechanism 10 consisting ofchange-over valves 11, 12 and connecting pipings 13, 14.

The gas discharging 8 is equipped with the discharge pump 81

This makes it possible to switch the gas introducing portion or gasdischarging portion 8 in accordance with the properties of the gascontaining dust to be removed, and for example, gas containing dust withsmall specific gravity is introduced to the upper part of the treatmentroom 1 or gas containing dust with large specific gravity to the lowerpart of the treatment room 1, thus preventing the short pass of airflow, thus securing the treatment of dust-containing gas.

In this case, the liquid discharging portion 9 is installed at a higherposition than the inside bottom surface of the liquid storage portion 5and the connecting pipings 13, 14 of the gas introducing portion 7 andgas discharging portion 8 are installed at a position higher than that.

With this dust-containing gas treatment apparatus, the dust caught bythe catcher 2 is washed down by the liquid sprayed from the sprayingmechanism 3 and the liquid is temporarily recovered in the liquidstorage portion 5 equipped with the stirrer 4 formed at the lower partof the treatment room 1 and the liquid containing dust is subsequentlydischarged via the liquid discharging portion 9 from the liquid storageportion 5, thus making it possible to achieve the treatment of the gascontaining dust of high concentration, maintenance-free smoothly underlow load environment with less pressure loss, without using a lot ofliquid.

Simultaneously with the removal of dust contained in the gas, theharmful gas contained in the gas can be made harmless by the liquidsprayed from the spraying mechanism 3.

With the dust-containing gas treatment apparatus of the above Embodiment1, the liquid can be uniformly sprayed through the treatment room 1 byinstalling the nozzle 31 of the liquid spraying mechanism 3 at theceiling surface of the treatment room 1, but the nozzle 31 of the liquidspraying mechanism 3 can also be installed at the intermediate positionof the treatment room 3 as the No. 2 embodiment of the dust-containinggas treat apparatus of this invention shown on Drawing 2.

In this case, it is preferable to use hydrophobic (hydrofuge) materialsuch as synthetic resin such as polyolefine resin such as polypropylene,polyethylene phthalate resin or metal for the hair of the catcher 2consisting of the brush at a higher position Z2 than it and hydrophilicmaterial such as polyamide resin nylon, polyvinyl chloride resin,polyvinylidene chloride resin, etc. for the hair of the catcher 2consisting of the brush at the lower position Z1.

This makes it possible to discharge dry the gas discharged from the gasdischarging portion 8 by dropping the liquid with the catcher 2consisting of the brush of the hair formed with the hydrophobic(hydrofuge) material at the higher position Z2 than the installationposition of the nozzle 31 of the liquid spraying mechanism 3, and at thesame time the dust is caught by the catcher 2 consisting of the brush ofthe hair formed with the hydrophilic material at the lower position Z1than the lower position than the installation position of the nozzle 31of the liquid spraying mechanism 3, thereby improving the dust removingefficiency.

In the dust-containing gas treatment apparatuses of the above Embodiment1 and Embodiment 2, the treatment room is made one room, but as theEmbodiment 3 of the dust-containing gas treatment apparatus of thisinvention shown on Drawing 2, the treatment room can be divided intoupper part and lower part.

Here the two treatment rooms 1A and 1B are basically equipped with thesame mechanism as for the dust-containing gas treatment apparatuses ofthe above Embodiment 1 and Embodiment 2, and the rotating shaft of thecatcher 2 (brush support 21) and that of the stirrer 4 can be made sameand the rotary driving mechanism 6 can be made common. This makes itpossible for an apparatus made compact to conduct multiple differenttreatments such as dust removal and making harmless the harmful gascontained in the gas.

Like Embodiment 4 of the dust-containing gas treatment apparatus of thisinvention shown on Drawing 4, the liquid storage portion 5 and liquiddischarging portion 9 can be shared by multiple dust-containing gasapparatuses (in this case, the liquid storage portion 5 and liquiddischarging portion 9 can be omitted or simplified from thedust-containing gas treatment apparatus) thereby simplifying theapparatus composition.

In this case, the liquid storage portion 5 can be equipped with thestirrer 4 and the rotary driving mechanism 6 to rotate the stirrer 4 canbe provided.

The liquid recovered in the liquid storage portion 5 can be circulatedto the liquid spraying mechanism 3 thereby reducing the liquidconsumption and discharge quantity. In this case, the liquid circulatingpassage 32 can be provided, as required, with filter 33, pump 34 andselector valve 35.

In the dust-containing gas treatment apparatus equipped with thetreatment room 1 of 200 mm in diameter, the liquid of several L/min tohundreds of L/min, preferably tens of L/min is normally sprayed from theliquid spraying mechanism 3, but through the circulated use of theliquid, the liquid consumption and discharge quantity can be reduced to1/10 or less of the liquid sprayed.

As aforementioned, the dust-containing gas treatment apparatusesdescribed in the above Embodiment 1 to Embodiment 4 can achieve thetreatment of the gas containing dust of high concentration under a lowload environment with less pressure loss, maintenance-free and smoothly,without using a lot of liquid, and the dust removing performance of eachapparatus is shown on Drawing 5. As clear from Drawing 5, it wasconfirmed that the dust-containing gas treatment apparatus of thisinvention demonstrated superior dust removing performance for dust ofparticle diameter in a wide range among various known apparatuses.

We have explained the dust-containing gas treatment apparatus of thisinvention in accordance with multiple embodiments, but this invention isnot limited to the compositions described in the above embodiments andit is possible to change the composition as required within the rangenot deviating from the purpose such as combining the componentsdescribed in the embodiments.

INDUSTRIAL APPLICABILITY

Since the dust-containing gas treatment apparatus of this invention hascharacteristics to smoothly achieve the treatment of gas containing dustof high concentration, it can be used suitably for the applications ofthe dust-containing gas treatment application for treating the gascontaining dust of high concentration in semiconductor industry,automobile industry, plastic industry, resource industry, ceramicindustry, powder metallurgy, detergent industry, catalyst industry,ferrite industry, color material industry, agricultural chemicalindustry, pharmaceutical industry feed industry, food industry, wastedisposal industry, biological industry, cosmetic industry, etc. and inaddition, it can be widely used as dust-containing gas treatmentapparatus to treat gas containing dust of high concentration at buildingand civil-engineering work sites and for such applications as gascleaning, air cleaning, disinfection, deodorizing, etc. because it canremove very small substances contained in gas.

EXPLANATION OF CODES

1 Treatment room

1A Treatment room

1B Treatment room

2 Catcher (brush)

21 Support

22 Hair

3 Liquid spraying mechanism

31 Nozzle

32 Liquid circulating passage

33 Filter

34 Pump

35 Selector valve

4 Stirrer

5 Liquid storage portion

6 Rotary driving mechanism

6′ Rotary driving mechanism

7 Gas introducing portion

8 Gas discharging portion

9 Liquid discharging portion

10 Switching mechanism

11 Selector valve

12 Selector valve

13 Connecting piping

14 Connecting piping

1-8. (canceled)
 9. The dust-containing gas treatment apparatus to removethe dust contained in gas is characterized in that it is equipped with acylindrical treatment room to introduce gas containing dust and removethe dust from the gas, catcher consisting brush with hair planted in thesupport installed in the treatment room and catch the dust contained inthe gas, liquid spraying mechanism installed in the treatment room,storage portion of the liquid flowing down through the treatment room,rotary driving mechanism to rotate the catcher, gas introducing the gascontaining dust into the treatment room, gas discharging portion todischarge the gas with the dust removed from the treatment room, andliquid discharging portion to discharge the liquid containing the dustremoved from the gas, and the aforementioned liquid spraying mechanismis arranged at the intermediate position of the treatment room and thehair of the catcher consisting of brush at a higher position than thatis composed of hydrophobic material.
 10. The dust-containing gastreatment apparatus described in claim 9 to remove the dust contained ingas is characterized in that it is equipped with a cylindrical treatmentroom to introduce gas containing dust and remove the dust from the gas,catcher consisting brush with hair planted in the support installed inthe treatment room and catch the dust contained in the gas, liquidspraying mechanism installed in the treatment room, storage portion ofthe liquid flowing down through the treatment room, rotary drivingmechanism to rotate the catcher, gas introducing the gas containing dustinto the treatment room, gas discharging portion to discharge the gaswith the dust removed from the treatment room, and liquid dischargingportion to discharge the liquid containing the dust removed from thegas, and the aforementioned liquid spraying mechanism is arranged at theintermediate position of the treatment room and the hair of the catcherconsisting of brush at a higher position than that is composed ofhydrophobic material.
 11. The dust-containing gas treatment apparatusdescribed in claim 9, wherein the liquid discharging portion is arrangedat a position higher than the inner bottom surface of the aforementionedliquid storage portion and the gas introducing and discharging portionare arranged at a higher position than that.
 12. The dust-containing gastreatment apparatus described in claim 9, characterized in the catcherconsisting of the hair of the brush arranged at a lower position thanthe aforementioned liquid spraying mechanism.
 13. The dust-containinggas treatment apparatus described in claim 9, wherein the aforementionedliquid storage portion is equipped with a stirrer and rotary drivingmechanism to rotate the stirrer.
 14. The dust-containing gas treatmentapparatus described in claim 9, wherein the aforementioned treatmentroom in divided into upper and lower parts.
 15. The dust-containing gastreatment apparatus described in claim 9, wherein the aforementionedliquid storage portion and liquid discharging portion can be shared bymultiple dust-containing gas treatment apparatuses.
 16. Thedust-containing gas treatment apparatus described in claim 9, whereinthe liquid recovered in the aforementioned liquid storage portion iscirculated to the liquid spraying mechanism.
 17. The dust-containing gastreatment apparatus described in claim 9, wherein the brush of theaforementioned catcher is composed of spiral brush.
 18. Thedust-containing gas treatment apparatus described in claim 9, whereinthe number of revolutions of the rotation shaft of the aforementionedcatcher is set in the range of 800 to 1500 rpm.